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The project will design and fabricate a single micropump and an array of microactuators. The basic strategy in these devices is to deposit a film as described earlier on a silicon substrate and back-etch carefully selected regions. The devices will be designed carefully using the models that were described in the previous sections. The models will be used to develop specific designs that optimize performance and minimize failure. The models will also be used to select material compositions, synthesis process and processing parameters for the films that will be used for fabrication. The research will be carried out in a collaborative manner by a multidisciplicary team from Applied Physics, Chemistry, Materials Science, Mechanical Engineering and Mechanics at the California Institute of Technology.





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